Abstract: Various embodiments introduce a device for attaching a protection film, the device comprising: a fixing tray including a seating portion on which an electronic device is stably placed; a base portion including a coupling portion to allow the fixing tray to be attached to or detached from the base portion and at least one rail formed along the longitudinal direction or the width direction of the coupling portion; a roller portion which moves along the at least one rail and presses a surface of the electronic device stably placed on the fixing tray; and a hardening portion coupled to the base portion, closing or opening the seating portion of the fixing tray, and emitting ultraviolet rays toward the fixing tray. Other embodiments are also possible.

Abstract: A radiation system includes a beam splitting apparatus configured to split a main radiation beam into a plurality of branch radiation beams and a radiation alteration device arranged to receive an input radiation beam and output a modified radiation beam, wherein the radiation alteration device is configured to provide an output modified radiation beam which has an increased etendue, when compared to the received input radiation beam, wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a main radiation beam and the radiation alteration device is configured to provide a modified main radiation beam to the beam splitting apparatus, or wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a branch radiation beam output from the beam splitting apparatus.

Abstract: A system and method for safe decontamination of a vehicle cabin while passengers can be present are disclosed that uses and/or has at least one data storage, at least one processor, at least one infrared (“IR”) sensor, and at least one ultraviolet (“UV”) emitter having a beam steering module. At least one contaminated area in the vehicle cabin is tracked using IR sensor data from the IR sensor. It is determined if there's a direct line of sight between the UV emitter and the at least one contaminated area. If so, UV emitter is activated to target the at least one contaminated area and blocking UV illumination on non-contaminated areas of the vehicle cabin and areas temporarily covered by a passenger.

Abstract: An arrangement for irradiating a surface includes a radiation source configured to emit ultraviolet radiation, a reflector for directional radiation of the ultraviolet radiation onto the surface, and a control device. A dose of the ultraviolet radiation required for sterilizing the surface and/or a dose already administered is settable and/or determinable by the control device.

Abstract: Systems and methods for determining bacterial load in targets are disclosed. An autofluorescence detection and collection device includes a light source configured to illuminate a target with excitation light causing at least one biomarker in the illuminated target to fluoresce. Bacterial autofluorescence data regarding the target is collected and analyzed to determine bacterial load the target. The autofluorescence data may be analyzed using pixel intensity.

Abstract: An adaptor for configuring a mobile communication device for tissue imaging is disclosed. The adaptor includes a housing configured to be removably coupled to a mobile communication device, at least one excitation light source for fluorescent imaging, a white light source for white light imaging, and a power source for powering the adaptor. The excitation light source is configured to emit light in one of ultraviolet, visible, near-infrared, and infrared ranges.

Abstract: This disclosure describes systems and methods for crosstalk-free source encoding for ultrasound tomography. This disclosed systems and methods feature real data acquisition acceleration and/or numerical simulation acceleration (or image processing acceleration).

Abstract: Provided herein are high energy ion beam generator systems and methods that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current/high-moderate voltage generation of neutrons and protons. Such systems and methods find use for the commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.

Abstract: According to some aspects, techniques are provided to mitigate challenges with additive fabrication devices that utilize a film. These techniques include: improvements to an additive fabrication device build platform to more evenly apply forces onto the film; techniques for inhibiting adhesion between a pair of films and for removing dirt or dust therein; techniques for detecting and/or mitigating the effects of scratches or dust on films; and techniques for detecting film punctures, detecting an imminent film puncture, and/or reducing the impact on the device when punctures occur.

Abstract: A sanitization system for an aircraft cabin may comprise: a cabin of an aircraft; a light system including a lighting unit configured to emit an electromagnetic radiation output between 300 and 430 nanometers (“nm”); an external reactive oxygen species (ROS) generator in fluid communication with the cabin, wherein the sanitization system is configured to disinfect a target area of the cabin by targeting the target area with the electromagnetic radiation output and the ROS.

Abstract: A scanning electron microscope device for a sample to be detected and an electron beam inspection apparatus are provided, the scanning electron microscope device being configured to project electron beam to a surface of the sample to generate backscattered electrons and secondary electrons, and comprising: an electron beam source, a deflection mechanism, and an objective lens assembly. The deflection mechanism comprises a first deflector located downstream the electron beam source and a second deflector located downstream the first deflector.

Abstract: Provided herein are various enhanced techniques for ultraviolet decontamination via emission of ultraviolet radiation and tracking emission exposure. An example method includes obtaining an emission characteristic for a radiation source. The method also includes capturing a depth map of a scene comprised of one or more objects and processing the depth map and an emission characteristic to determine an indication of exposure levels of the one or more objects to radiation emitted by the radiation source. An exposure visualization is generated based at least on the indication of exposure levels and displaying the exposure visualization.

Abstract: This disclosure discloses an optical sensing device. The device includes a carrier body having a topmost surface; a first light-emitting device disposed on the carrier body and having a light-emitting surface; and a light-receiving device comprising a group III-V semiconductor material disposed on the carrier body and having a light-receiving surface. The light-emitting surface is separated from the topmost surface by first distant H1, the light-receiving surface is separated from the topmost surface by a second distance H2, and H1 is different from H2.

Abstract: An apparatus for creating resonant standing waves in biological tissue, in particular in the treatment of medical conditions, comprising at least one applicator for application to biological tissue and a drive unit for driving the at least one applicator simultaneously with AM modulated and FM modulated carrier signals in order to create resonant standing waves in the tissue.

Abstract: A treatment apparatus for a vehicle comprises: a housing with at least one wall and a floor forming a treatment chamber; a source of ultraviolet light configured to emit ultraviolet light into the treatment chamber; and a door connected to the housing, the door having (i) an open position providing access to the treatment chamber and (ii) a closed position denying access to the treatment chamber and, together with the housing, preventing emitted ultraviolet light from irradiating beyond the treatment chamber.

Abstract: Embodiments herein describe an atomic sensor that includes a photonic die that outputs optical signals on a top surface. These optical signals can be directed and shaped as needed to satisfy a particular type of atomic sensor. In one embodiment, an atomic source (e.g., rubidium or cesium) is disposed on the photonic chip to emit atoms when heated. A collimator can then direct the emitted atoms along a path that intersects with the optical signals. This intersection can be used to detect motion (e.g., rotation and acceleration) of the atomic sensor.

Abstract: Embodiments of the present invention provide methods and systems for proton therapy planning that maximize the dose rate for different target sizes for FLASH therapy treatment are disclosed herein according to embodiments of the present invention. According to embodiments, non-standard scanning patterns can be generated, for example, using a TPS optimizer, to maximize dose rate and the overall FLASH effect for specific volumes at risk. The novel scanning patterns can include scanning subfields of a field that are scanned independently or spiral-shaped patterns, for example. In general, spot locations and beam paths between spots are optimized to substantially achieve a desired dose rate in defined regions of the patient's body for FLASH therapy treatment.

Abstract: Plant growth and energy storage is supported by complicated bio-electro-chemical processes causing the intake of water and nutrients from the ground. These processes are affected by adaptations such as root structure and genetic characteristics that facilitate a plant species' survival in its native regions. Disclosed are methods for altering the water and nutrient intake through electrical alignment of molecules with dipole characteristics and ionized molecules, and apparatus for performing the disclosed methods. Through the disclosed invention, the capacity of water molecules to interact at an electro-chemical level with soil elements can be increased or reduced to guide absorption-transport activity, facilitating optimal plant growth for agricultural and other purposes.

Abstract: An irradiation method and system for irradiating a target volume, the method comprising: providing thermal neutron absorbing nuclides (such as in the form of a high neutron cross-section agent) at the target volume; and producing neutrons by irradiating nuclei in or adjacent to the target volume with a beam of particles consisting of any one or more of protons, deuterons, tritons and heavy ions, thereby prompting production of the neutrons through non-elastic collisions between the atoms in the path of the beam (including the target) and the particles. The neutron absorbing nuclides absorb neutrons produced in the non-elastic collisions, thereby producing capture products or fragments that irradiate the target volume.

Abstract: A mask includes a first light-transmitting portion. The first light-transmitting portion includes a target region and at least one compensation region connected to the target region. A planar pattern of the target region includes a plurality of corners, and a planar pattern of each compensation region extends from one of the plurality of corners. An area of the planar pattern of each compensation region is less than an area of the planar pattern of the target region.

Abstract: A sterilizing lamp comprises a lamp body module having an air inlet and an air outlet at the-bottom and top of the module, respectively, a circuit board module, an ultraviolet light emitting device, a fan and a filter screen bracket. The filter screen bracket wraps and covers the ultraviolet light emitting device. An airflow channel opening is arranged on the filter screen bracket. An air filtering device is wrapped on the filter screen bracket to cover the airflow channel opening. The outside air is suctioned by the fan into the module and is filtered by the air filtering device and then is discharged from the air outlet. When the air passes through the air filtering device fine particulate matter are filtered and retained by the air filtering device, and are irradiated for sterilization in the ultraviolet light emitting device.

Abstract: Disclosed is an ultraviolet (UV) curing apparatus for nail art, which is configured to focus-irradiate UV light to a curing material coated on fingernails or toenails and to quickly cure the curing material. The disclosed UV curing apparatus comprises: a housing having a receiving space in which user's fingernails or toenails are received; a light source, installed in the housing, for irradiating UV light rays; an optical module provided with a focusing lens for focusing the light rays irradiated from the light source to a target position in the receiving space; and a scanning unit, installed in the housing, for driving the optical module to be capable of reciprocating within the housing in one scanning direction, to allow the target position to move to the entire region of user's fingernails or toenails received in the receiving space.

Abstract: A system, method and apparatus for creating an electric glow discharge includes a non-conductive housing having a longitudinal axis, a first opening aligned with the longitudinal axis, and a second opening aligned with the longitudinal axis and opposite the first opening, a first electrically conductive screen disposed proximate to the first opening of the housing and substantially perpendicular to the longitudinal axis, a second electrically conductive screen disposed proximate to the second opening of the housing and substantially perpendicular to the longitudinal axis, wherein the second electrically conductive screen separated from the first electrically conductive screen by a substantially equidistant gap, a non-conductive granular material disposed within the substantially equidistant gap, and the electric glow discharge is created whenever the first electrically conductive screen has a first polarity, the second electrically conductive screen has a second polarity, and an electrically conductive fluid

Abstract: A method of sterilizing and storing laboratory consumables comprises slidably receiving a carrier holding a plurality of laboratory consumables into each of one or more of a plurality of storage compartments within an interior chamber defined in a housing, exposing the plurality of laboratory consumables to ultraviolet (UV) light from a UV lamp positioned above each respective storage compartment and from a UV lamp positioned below each respective storage compartment, determining from which of the plurality of storage compartments a carrier should be removed based on for which carrier a longest period of time has elapsed since going through a predefined sterilization procedure, and indicating to a user into which of the plurality of storage compartments a carrier should be placed or indicating to a user from which of the plurality of storage compartments a carrier should be removed.

Abstract: A system for classifying a pattern of interest (POI) on a semiconductor specimen is disclosed. The system comprises a processor and memory circuitry. The memory circuitry is configured to obtain a high-resolution image of the POI, and to generate data usable for classifying the POI in accordance with a defectiveness-related classification. To generate the data, a machine learning model is utilized that has been trained in accordance with training samples. The training samples include a high-resolution training image captured by scanning a respective training pattern on a specimen, the respective training pattern being similar to the POI. The training samples also include a label associated with the image, the label being derivative of low-resolution inspection of the respective training pattern.

Abstract: In an embodiment, a lighting apparatus includes a housing, a lamp, and a filter. The housing has a cavity with an opening, and the lamp is disposed within the cavity and is configured to emit electromagnetic radiation at wavelengths of approximately 253.7 nanometers and of approximately 405 nanometers. And the filter is mounted adjacent to the opening and is configured to pass the emitted electromagnetic radiation at the wavelength of approximately 253.7 nanometers with a transmissivity of at least approximately 70% and at the wavelength of approximately 405 nanometers with a transmissivity of no more than approximately 5%.

Abstract: Systems and methods of measuring beam current in a multi-beam apparatus are disclosed. The multi-beam apparatus may include a charged-particle source configured to generate a primary charged-particle beam, and an aperture array. The aperture array may comprise a plurality of apertures configured to form a plurality of beamlets from the primary charged-particle beam, and a detector including circuitry to detect a current of at least a portion of the primary charged-particle beam irradiating the aperture array. The method of measuring beam current may include irradiating the primary charged-particle beam on the aperture array and detecting an electric current of at least a portion of the primary charged-particle beam.

Abstract: Embodiments of the disclosure include an uncovered ultraviolet light emitting panel for use in supporting instruments in an operating room. The panel fits inside an autoclave for sterilization and can be utilized without a sterile cover. In use, the panel irradiates surgical instruments and the nearby air continuously.

Abstract: This application provides a wall-mounted air purifier, including a casing, a filter mounted in the casing, and a fan mounted in the casing. The casing is provided with an air inlet and an air outlet, and the air outlet is located at the position corresponding to the outlet of the fan, the filter is located between the air inlet and the fan, an ultraviolet light source is also mounted in the casing, and the ultraviolet light source is arranged between the air inlet and the fan. The wall-mounted air purifier provided in the present application filters and purifies the air by providing a filter in the casing; and an ultraviolet light source is mounted in the casing to sterilize and disinfect the gas entering the air inlet and purify the air, improve air purification capacity.

Abstract: An air treatment device includes: a casing having an inlet through which air is drawn, and an outlet out of which the air drawn through the inlet is blown; a blade configured to adjust a direction of the air blown out of the outlet; and a generator configured to generate an antimicrobial element that sanitizes the blade. The blade has a first surface, and a second surface opposite to the first surface. The blade is shiftable between a first position in which the antimicrobial element is provided to the first surface and a second position in which the antimicrobial element is provided to the second surface.

Abstract: A system in which electrical characteristics of an element formed on a sample can be evaluated. The system includes an image acquisition tool and a computer system that includes one or more processors and is configured to be communicable with the image acquisition tool. Electrical characteristic are derived by the image acquisition tool by receiving information regarding two or more characteristics of a specific pattern that is included in a plurality of images acquired from the image acquisition tool under at least two different image acquisition conditions and by referring to, for the information, relation information between information regarding two or more characteristics and electrical characteristics of an element formed on a sample, the characteristics being extracted from at least two pieces of image data acquired from the image acquisition tool under at least two image acquisition conditions.

Abstract: A food bar arrangement (100) with product holding elements (103A,103B) holding fresh food products, an openable covering arrangement (110) including at least one covering element (10A, 10B) transferable between a closed and an open position, covering element sensing means (30A, 30B) registering an activation or a movement of the covering element (10A,10B) towards an open position or vice versa, a disinfection arrangement including a plurality of UV-C sources (52) in activated state exposing the food products to UV-C light at a wavelength appropriate for inactivation of pathogens, and a disinfection control system communicating with the covering element sensing means (30A,30B) and an UV-C source activating/deactivating arrangement (40) controlling the disinfection arrangement, and some of the UV-C sources are deactivated when a covering element is opened or moved towards an open position.

Abstract: A method and apparatus for dosage measurement and monitoring in an ion implantation system is disclosed. In one embodiment, a transferring system, includes: a vacuum chamber, wherein the vacuum chamber is coupled to a processing chamber; a shaft coupled to a ball screw, wherein the ball screw and the shaft are configured in the vacuum chamber; and a vacuum rotary feedthrough, wherein the vacuum rotary feedthrough comprises a magnetic fluid seal so as to provide a high vacuum sealing, and wherein the vacuum rotary feedthrough is configured through a first end of the vacuum chamber and coupled to the ball screw so as to provide a rotary motion on the ball screw.

Abstract: A beam delivery system for a radiotherapy system comprises a particle accelerator for generating a radiation beam and a positioning apparatus for moving the particle accelerator. The positioning apparatus comprises a counterbalanced lever carrying the particle accelerator. The particle accelerator may be a proton accelerator producing a proton beam.

Abstract: In one embodiment, a data generation method is for calculating a coverage of a polygon in each of a plurality of pixels obtained by dividing a target to be irradiated with a charged particle beam into predetermined sizes. The method includes dividing a parametric curve that defines a pattern shape into a plurality of parametric curves, calculating, for each of the plurality of parametric curves, an area of a region surrounded by a segment connecting end points among control points of the parametric curve and the parametric curve, calculating positions of vertexes of a figure having an area equivalent to the calculated area and having, as one side thereof, the segment connecting the end points, and generating the polygon by using the vertexes.

Abstract: Sterilizing devices, preferably foot mats, comprise: a support member having an arrangement structure and a plurality of UV light emitting members, where the support member is configured for total internal reflection of UV light from the UV light emitting members; a power source providing power to the plurality of UV light emitting members; and a translucent substrate having an upper surface and a lower surface; wherein the translucent substrate is disposed above the support member such that the lower surface of the translucent substrate can be brought into contact with an upper region of the support member when a downward force is applied to the upper surface of the translucent substrate; and wherein the contact between the lower surface of the translucent substrate and the support member breaks the total internal reflection in the area of contact such that UV light is emitted through the translucent substrate.

Abstract: Embodiments disclosed include autonomous robotic systems and methods for disinfecting an environment. An autonomous disinfecting system comprises, in a housing, a first unit comprising a first plurality of UV-C lamps attached to a first wireless base comprising a plurality of wheels. Preferably, the first unit further comprises a docking port for a second unit comprising a second plurality of UV-C lamps attached to a second wireless base, and a motion sensor configured to send a signal to a processing unit comprised in the autonomous disinfecting system wherein the processing unit is configured to shut down the system when it receives a signal indicating a detected movement.

Abstract: A refrigerator includes a rear assembly panel coupled with an assembly cover panel that includes at least one vent. At least one circulation fan is positioned between the rear assembly panel and the assembly cover panel and is proximate the at least one vent. A filter is positioned between the rear assembly panel and the assembly cover panel and is coupled to a photocatalyst to form an activated carbon filter. A light-emitting diode (LED) panel assembly includes a plurality of LEDs positioned on the rear assembly panel and is positioned to project light on the activated carbon filter. An air circulation path extends through the at least one vent and the activated carbon filter and is configured to direct air along the air circulation path, and the activated carbon filter is configured to filter airborne bacteria and particulate matter from the air as the air passes through the activated carbon filter.

Abstract: Provided is a contactless internal measurement device including an electromagnetic wave irradiation unit that irradiates an electromagnetic wave to a measurement subject, and an electromagnetic wave receiver that detects the electromagnetic wave reflected by the measurement subject. The electromagnetic wave irradiation unit is disposed to reduce a polarization component of the electromagnetic wave detected by the electromagnetic wave receiver, the polarization component being the same as a polarization component of the electromagnetic wave irradiated by the electromagnetic wave irradiation unit.

Abstract: A system, apparatus, and method for thermal regulation in a tiered rack growth system. A contact heat exchange converter is provided to remove thermal energy of a light fixture for the tiered rack growth system. A contact thermal exchange cavity defined in the contact heat exchange converter is dimensioned to cooperatively receive an arcuate thermal sink of the light fixture. A circulation conduit communicates a dense medium coolant to remove thermal energy carried by a thermal mass of the contact heat exchange converter.

Abstract: A valuable media sanitizing/cleansing cassette is provided for sanitizing/cleansing surfaces of valuable media dispensed to a consumer during a dispense transaction at a transaction terminal. Dispensed media is urged from one or more media cassettes within the terminal along a transport path. The transport path is altered to pass the media through the sanitizing/cleansing cassette where the top and bottom surfaces of the media are illuminated with Ultraviolet (UV) radiation to eradicate any bacteria or virus that may be adhered to the top or the bottom surfaces of the media. Once the media passes through the sanitizing/cleansing cassette, the now sanitized/cleansed media is urged along a remainder of the transport path and dispensed from a media interface of the terminal to the consumer. In an embodiment, media deposited at the terminal is also sanitized/cleansed by passing through the sanitizing/cleansing cassette before being stored in the appropriate media cassettes.

Abstract: An additive manufacturing machine includes a laser light source, a beam entry window, a recoater, a plurality of light sources attached to the recoater, a photosensor, and a controller. The laser light source emits laser light to selectively melt one or more portions of a working layer of a powder bed during additive manufacturing of a part. The beam entry window is positioned between the powder bed and the laser light source. The recoater moves across the powder bed to spread the working layer. The photo sensor senses intensity of light emitted by each of the plurality of light sources through the beam entry window. The controller correlates sensed intensity of the light emitted by each of the plurality of light sources through the beam entry window to corresponding positions on the beam entry window based on locations of each of the plurality of light sources.

Abstract: Aspects of the present disclosure relate to a light-emitting system comprising a plurality of LEDs having relatively small nearest-neighbor distances (e.g., a close-packed array of LEDs). In some cases, one or more LEDs of the plurality of LEDs comprise a via between a semiconductor layer (e.g., an n-type semiconductor layer forming part of a p-n junction) and a heat dissipation substrate. The presence of the vias may advantageously reduce or eliminate current crowding and may allow the LEDs to be operated at a high current density (e.g., at least 1A/mm2). In some cases, one or more LEDs of the plurality of LEDs comprise a first contact pad (e.g., an n-side contact pad) and a second contact pad (e.g., a p-side contact pad) positioned in any location, which may allow the LEDs to be configured in series or in parallel, or to be individually addressable. The first and second contact pads of the LEDs may be electrically connected to other elements of the light-emitting system (e.g.

Abstract: A system and method for controlling electrostatic clamping of multiple platens on a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on a spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The plurality of platens may extend outward from the central hub and workpieces are electrostatically clamped to the platens. The central hub provides the electrostatic clamping voltages to each of the plurality of platens. Further, the plurality of platens may also be capable of rotation about an axis orthogonal to the rotation axis of the central hub. The central hub controls the rotation of each of the platens. Power connections and communications are provided to the central hub via the spindle assembly.

Abstract: A multi-degree-of-freedom sample holder, comprising a housing and a rotating shaft, is disclosed. A frame is provided between the housing and the rotating shaft, and the frame is coaxial with the housing and rotating shaft. The present invention has multiple degrees of freedom such as high-precision translational freedom of the sample along the X-axis, Y-axis and Z-axis, and 360° rotation of the sample around the axis, etc. The sample is always aligned with the sample holder shaft during the rotation, and the static electricity accumulated on the sample can be led out.

Abstract: A lithography system is provided capable of deterring contaminants, such as tin debris from entering into the scanner. The lithography system in accordance with various embodiments of the present disclosure includes a processor, an extreme ultraviolet light source, a scanner, and a hollow connection member. The light source includes a droplet generator for generating a droplet, a collector for reflecting extreme ultraviolet light into an intermediate focus point, and a light generator for generating pre-pulse light and main pulse light. The droplet generates the extreme ultraviolet light in response to the droplet being illuminated with the pre-pulse light and the main pulse light. The scanner includes a wafer stage. The hollow connection member includes an inlet that is in fluid communication with an exhaust pump. The hollow connection member provides a hollow space in which the intermediate focus point is disposed.

Abstract: An apparatus includes an ion chamber and a valve assembly. The ion chamber may include a housing enclosing a gas and one or more electrodes. The valve assembly is coupled to the ion chamber allowing control of replacement of the gas within the housing.

Abstract: An electron-beam device includes upper-column electron optics and lower-column electron optics. The upper-column electron optics include an aperture array to divide an electron beam into a plurality of electron beamlets. The upper-column electron optics also include a lens array with a plurality of lenses to adjust the focus of the plurality of electron beamlets. Respective lenses of the plurality of lenses are to adjust the focus of respective electron beamlets of the plurality of electron beamlets. The upper-column electron optics further include a first global lens to adjust the focus of the plurality of electron beamlets in a manner opposite to the lens array.

Abstract: The invention relates to an illumination device comprising a domeshaped, cylindrical lens (7) having an optical focal line (19) and a plurality of light sources (3) arranged along the focal line and configured to emit light during operation. Said lens being disposed to receive and to deflect said light as a light beam having an angle y in a transverse direction, wherein 0?<=7<=30?. In transversal cross section the cylindrical lens comprises a central portion (21) flanked by a first side portion (23) and a second side portion (25). The illumination device further comprises an axially extending screen (27) disposed adjacent to the first side portion; and an axially extending diffuser (33) provided at the second side portion.

Abstract: A temperature measuring device that measures a temperature of a rotatable stage that holds a substrate, includes: a contact portion provided at a position that does not hinder placing of the substrate on the stage, and a temperature detector having a temperature sensor, and provided at a position separated from the temperature detection contact portion except when measuring a temperature. When measuring the temperature of the stage, the temperature detection contact portion and the temperature detector are relatively moved and brought into contact with each other in a state where the stage is not rotating to detect the temperature of the stage.