Abstract: Disclosed is a substrate processing apparatus, including: a processing space to provide a space in which a substrate is to be processed; a heating member to heat the processing space; a gas supply member to supply at least first and second processing gases to the processing space; an exhaust member to exhaust an atmosphere in the processing space; and a control member to control at least the gas supply member and the exhaust member such that supply and exhaust of the first and second processing gases are alternately repeated a plurality of times so that the first and second processing gases are not mixed with each other in the processing space when forming a desired film on the substrate, and both the first and second processing gases are supplied to the processing space when coating a surface of an inner wall of the processing space with a desired film.

Abstract: A method of making a window unit is provided which may result in improved yields. In certain example embodiments, the method involves coating a substrate with both (i) a solar control/management coating, and (ii) a protective layer (e.g., of or including diamond-like carbon (DLC)) over the solar control/management coating. The protective layer protects the coated substrate from scratches and/or the like during processing prior to heat treatment. Then, during heat treatment, the protective layer(s) is burned off in part or in whole. Following heat treatment, the coated article (substrate with solar control/management coating thereon) is coupled to another substrate in order to form the window unit.

Abstract: An Si—O containing hydrogenated carbon film as an optical film has a refractive index in a range from at least 1.48 to at most 1.85 for light of 520 nm wavelength and an extinction coefficient of less than 0.15 for light of 248 nm wavelength, wherein the refractive index and the extinction coefficient are decreased with energy beam irradiation. By utilizing such an Si—O containing hydrogenated carbon film, it is possible to provide various types of optical elements and an optical device including the same.

Abstract: Embodiments of the invention provide a magnetic recording medium superior in terms magnetic head flying performance, abrasion resistant reliability and corrosion resistance and a method for manufacturing the same. In one embodiment, method for manufacturing a magnetic recording medium, comprising forming at least an adhesion layer, a soft magnetic layer, a granular magnetic film and a diamond-like carbon (DLC) protective film on a nonmagnetic substrate. While the DLC protective film layer to protect the granular magnetic layer of the magnetic recording medium is formed, hydrocarbon gas is mixed with hydrogen gas and a bias voltage is applied to the substrate.

Abstract: A method of making a window unit is provided which may result in improved yields. In certain example embodiments, the method involves coating a substrate with both (i) a solar control/management coating, and (ii) a protective layer (e.g., of or including diamond-like carbon (DLC)) over the solar control/management coating. The protective layer protects the coated substrate from scratches and/or the like during processing prior to heat treatment. Then, during heat treatment, the protective layer(s) is burned off in part or in whole. Following heat treatment, the coated article (substrate with solar control/management coating thereon) is coupled to another substrate in order to form the window unit.

Abstract: Disclosed is a method for manufacturing a diamond film of electronic quality at a high rate using a pulsed microwave plasma. The plasma that has a finite volume is formed near a substrate (in a vacuum chamber) by subjecting a gas containing at least hydrogen and carbon to a pulsed discharge. The pulsed discharge has a succession of low-power states and of high-power states and a peak absorbed power PC, in order to obtain carbon-containing radicals in the plasma. These carbon-containing radicals are deposited on the substrate in order to form a diamond film. Power is injected into the volume of the plasma with a peak power density of at least 100 W/cm3, while maintaining the substrate to a substrate temperature of between 700° C. and 1000 ° C.

Abstract: Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The quality of DLC layers is fine-tuned by a properly biased system of special electrodes and by exact control of the feed gas mixture compositions. Uniform (with degree of non-uniformity of optical parameters less than 5%) large area (more than 110 cm2) DLC films with optical parameters varied within the given range and with stability against harmful effects of the environment are achieved.

Abstract: A production device for a DLC film-coated plastic container and a production method therefor, capable of forming DLC (diamond-like carbon) films simultaneously on the inner surfaces of a plurality of plastic containers, and reducing variations in film thickness. A production device for DLC film-coated plastic containers, for forming a plurality DLC films simultaneously, characterized by comprising a columnar external electrode (3) having housing spaces in which a plurality of plastic containers (7a-7d) can be disposed in parallel and independently, internal electrodes (9a-9d) respectively disposed in the housed containers (7a-7d), a matching box (14) connected to the external electrode (3) and impedance-matching a high-frequency load, and a high-frequency power supply (15) connected to the matching box.

Abstract: Fluorinated, diamond-like carbon (F-DLC) films are produced by a pulsed, glow-discharge plasma immersion ion processing procedure. The pulsed, glow-discharge plasma was generated at a pressure of 1 Pa from an acetylene (C2H2) and hexafluoroethane (C2F6) gas mixture, and the fluorinated, diamond-like carbon films were deposited on silicon <100>substrates. The film hardness and wear resistance were found to be strongly dependent on the fluorine content incorporated into the coatings. The hardness of the F-DLC films was found to decrease considerably when the fluorine content in the coatings reached about 20%. The contact angle of water on the F-DLC coatings was found to increase with increasing film fluorine content and to saturate at a level characteristic of polytetrafluoroethylene.

Abstract: The present invention relates to post manufacturing operations for improving the working life of known bonding tools such as capillaries, wedges and single point TAB tools of the type used in the semiconductor industry to make fine wire or TAB finger interconnections. After the desired bonding tool is manufactured to predetermined specifications, dimensions and tolerances, it is placed in a sputtering chamber with hard target material with an ionizing gas. A controlled volume of sputtered hard material is generated at high temperature by plasma ion bombardment and deposited onto the working face of the bonding tool while the tool is held at a temperature that prevents distortion. A very thin amorphous hard layer is bonded onto the working face of the bonding tool which increases the working life of most tools by an order of magnitude and there is no requirement for additional processing.

Abstract: The invention describes composite coatings, in particular comprising carbon and another metallic element such as silicon or aluminium. These coatings have improved properties compared with pure tetrahedral amorphous carbon coatings, in that they have reduced stress levels and can be deposited at higher thicknesses, whilst retaining acceptable hardness and other useful mechanical properties. Also described are methods of making composite coatings, materials for making the coatings and substrates coated therewith. Specifically, a method of applying a coating to a substrate using a cathode arc source, comprises generating an arc between a cathode target and an anode of the source and depositing positive target ions on the substrate to form the coating, wherein the coating is a composite of at least first and second elements and the target comprises said at least first and second elements.

Abstract: This invention relates to a process for forming a lubricant layer of differing thickness on distinct zones of a maonetic disk of a hard disk drive without heating, inert gas plasma and UV-radiation or E-beam exposition. According to the present invention. an overcoat layer with distinct zones of differing thickness is first sputtered on the disk surface by using distinct masks under different sputtering conditions. A lubricant layer is then uniformly coated on the overcoat layer. Since a part of lubricant is bonded to the overcoat to form a bonded lubricant layer and the thickness of the bonded lubricant layer relates to the overcoat layer's property, a free lubricant layer with zoned thickness is consequently formed, which the free lubricant layer consists of the leftover lubricant. The zoned lubricant layer of the invention hence decreases the flying stiction.

Abstract: A method for making particles coated with a diamond-like network, which can include additive components. The method comprises subjecting a multiplicity of particles to a carbon-based plasma in an evacuated radio frequency powered capacitively coupled reactor system in which ion sheaths are formed around the electrodes and wherein the particles are agitated in such a manner as to expose their surfaces to the reactive species in the plasma while keeping the particles substantially within an ion sheath.

Abstract: A process for depositing a diamond-like carbon film, which comprises providing a means for generating a sheet-like beam-type plasma region inside a vacuum vessel for depositing the diamond-like carbon film, and depositing the film on a substrate being moved through said plasma region. Also claimed is an apparatus for fabricating a magnetic recording medium by sequentially and continuously forming a magnetic layer and a diamond-like carbon film on a polymer substrate material, which comprises at least a first vacuum vessel for forming the magnetic layer of the magnetic recording medium and a second vacuum vessel for forming the diamond-like carbon film, provided that the pressure difference between the operation pressures for the first vessel and the second vessel is set in the range of from 10.sup.-2 to 10.sup.-5 Torr.