Patents Assigned to Nikon Corporation
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Publication number: 20240184214Abstract: An exposure apparatus includes: a substrate stage onto which a substrate is to be mounted; an exposure unit radiating an exposure light toward the draw-out electrode on at least one semiconductor chip; a pattern determination unit determining an exposure pattern; and a controller controlling the substrate stage and the exposure unit. The pattern determination unit determines a pattern of a relay wiring connecting the draw-out electrode and a predetermined position with respect to the substrate, by using an output from a measurement unit to measure a position of the semiconductor chips on the substrate to obtain a positional deviation. The controller exposes the relay wiring pattern onto an exposure area extending, on the photosensitive layer, in the uniaxial direction by the exposure unit, while moving the substrate from a first-side in the uniaxial direction to a second-side opposite to the first-side in the uniaxial direction by the substrate stage.Type: ApplicationFiled: March 17, 2022Publication date: June 6, 2024Applicant: NIKON CORPORATIONInventor: Yoji WATANABE
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Patent number: 12000998Abstract: A magnification-variable optical system having a small size, a wide angle of view, and high optical performance, an optical apparatus including the magnification-variable optical system, and a method for manufacturing the magnification-variable optical system are provided. A magnification-variable optical system ZL used for an optical apparatus such as a camera 1 includes a first lens group G1 having a negative refractive power and including at least two lenses, and a rear group GR including at least one lens group disposed on an image side of the first lens group G1, and is configured so that a distance between lens groups adjacent to each other changes at magnification change and a condition expressed by predetermined condition expressions is satisfied.Type: GrantFiled: December 20, 2019Date of Patent: June 4, 2024Assignee: Nikon CorporationInventors: Fumiaki Ohtake, Azuna Nonaka
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Publication number: 20240176248Abstract: An optical apparatus, which illuminates a first area with light from a light source while the first area is longer in a second direction intersecting a first direction than in the first direction, includes a collector optical member which is arranged in an optical path between the light source and the first area, and condenses the light from the light source to form a second area in a predetermined plane, the second area being longer in a fourth direction intersecting a third direction than in the third direction; and a first fly's eye optical member which is provided within the predetermined plane including the second area, and has a plurality of first optical elements guiding the light of the collector optical member to the first area.Type: ApplicationFiled: February 6, 2024Publication date: May 30, 2024Applicant: NIKON CORPORATIONInventors: Hideki KOMATSUDA, Yoshio KAWABE
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Publication number: 20240173773Abstract: A build apparatus builds a first structural layer by irradiating a first beam position, builds a first build object and irradiating the first build object, a second irradiation beam position builds a second build object. The build apparatus further builds a second structural layer by irradiating the first structural layer, a third irradiation beam position builds a third build object and by irradiating the third build object, a fourth irradiation beam position builds a fourth build object. At least one of a distance between first and second position and a distance between third and fourth position is shorter than a distance between second and third position. Thus, the build apparatus builds a structural object including the first and second structural objects and is inclined with respect to an optical axis direction.Type: ApplicationFiled: March 24, 2021Publication date: May 30, 2024Applicant: NIKON CORPORATIONInventors: Kei SEKIGUCHI, Kazuki UENO, Fumika SHIKI, Ryo NAKAYAMA, Hiroki SASAKI, Tatsuya SUZUKI
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Patent number: 11994811Abstract: In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.Type: GrantFiled: October 7, 2022Date of Patent: May 28, 2024Assignee: NIKON CORPORATIONInventor: Akihiro Ueda
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Patent number: 11994746Abstract: A zoom lens comprises, in order from an object: a first lens group (G1) having positive refractive power; a second lens group (G2) having negative refractive power; a third lens group (G3) having positive refractive power; a fourth lens group (G4) having negative refractive power; and a fifth lens group (G5) having positive refractive power, in which the first to the fifth lens groups (G1 to G5) each move in an optical axis direction upon zooming from a wide angle end state to a telephoto end state, at least a part of the fourth lens group (G4) is configured to serve as a focusing lens group to move in the optical axis direction upon focusing, the first lens group (G1) consists of two lenses, and the following conditional expression is satisfied. 0.30<GD3/ft<0.8 where, GD3 denotes a thickness of the third lens group (G3) on the optical axis, and ft denotes a focal length of the zoom lens in the telephoto end state.Type: GrantFiled: November 15, 2021Date of Patent: May 28, 2024Assignee: Nikon CorporationInventor: Keiichi Nakamura
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Publication number: 20240164635Abstract: An ophthalmic instrument including a light emitter, an optical system, and a control section. The light emitter includes a light source including at least one out of a first light source unit or a second light source unit that emits light for examining a subject eye. The light emitter is configured to emit light from the light source. The optical system guides light emitted from the light emitter onto a right-eye retina and/or onto a left-eye retina. The control section is configured to control the light emitter and the optical system such that the light is shone onto the right-eye retina and/or onto the left-eye retina.Type: ApplicationFiled: January 31, 2024Publication date: May 23, 2024Applicant: NIKON CORPORATIONInventors: Hideki OBARA, Ken TOMIOKA, Shota MIYAZAKI
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Patent number: 11989887Abstract: A processing system includes a machine tool including a measuring unit which outputs measurement information for calculating a shape of a processing object, a control unit which generates position information related to a position of the measuring unit at the time of measuring the processing object and outputs the generated position information and a generation time signal indicating a time at which the position information is generated, an acquisition unit which acquires the output position information and the generation time signal, an estimation unit which estimates the time at which the position information is generated on the basis of a time at which the acquisition unit acquires the generation time signal, and a shape calculation unit which calculates a shape of the processing object on the basis of the measurement information, the position information, and the time estimated by the estimation unit.Type: GrantFiled: December 25, 2017Date of Patent: May 21, 2024Assignee: NIKON CORPORATIONInventor: Tomoaki Yamada
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Patent number: 11988822Abstract: The present invention relates to a microscope of which visibility, controllability and operability can be improved. In the microscope, an optical path and optical path of an image forming system are set so as to be perpendicular to each other when viewed from the top. In other words, in this microscope, there exists an ocular optical system that guides light, which propagates the optical path to optical path of the image forming system, to a user. The optical path is formed in a direction perpendicular to a direction of the light from a sample emitted from the ocular optical system to the user. The present invention can be applied to an inverted microscope.Type: GrantFiled: March 2, 2020Date of Patent: May 21, 2024Assignee: NIKON CORPORATIONInventors: Toru Murayama, Atsushi Takeuchi, Yumiko Ouchi, Yuki Yoshida
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Publication number: 20240157641Abstract: Directed energy beam deflections are compensated by mapping pixel coordinates of an image of a patterning field to patterning field spatial coordinates. For example, electron beam scanning is compensated by imaging calibration features defined on a reticle to produce a mapping between pixel and physical coordinates. An electron beam is scanned to produce cathodoluminescence at a plurality of scan locations in a patterning field. With the pixel coordinate mapping, an image of the cathodoluminescence is used to determine compensated scan drive values. Other directed energy beam deflections can be similarly compensated.Type: ApplicationFiled: March 4, 2022Publication date: May 16, 2024Applicant: NIKON CORPORATIONInventors: Jacek Kazimierz TYMINSKI, Michael Birk BINNARD
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Publication number: 20240163584Abstract: An image sensor includes a first photoelectric conversion unit that converts light incident through a first opening to an electric charge, a second photoelectric conversion unit that converts light incident through a second opening which is smaller than the first opening to an electric charge, and a signal output wiring that outputs a first signal generated by the electric charge converted by the first photoelectric conversion unit and a second signal generated by the electric charge converted by the second photoelectric conversion unit. The second photoelectric conversion unit is disposed between the second opening and the signal output wiring.Type: ApplicationFiled: January 12, 2024Publication date: May 16, 2024Applicant: NIKON CORPORATIONInventor: Hironobu MURATA
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Publication number: 20240161395Abstract: Methods and systems for generating 3D models of surfaces that accurately reconstruct both the global structure of an object and its local features are described. The methods and systems generally operated by fusing point features from the point cloud data with voxel features extracted from voxelization procedures. Furthermore, the methods and systems utilize voxelization at multiple spatial resolutions. The use of point-voxel fusion and multiple spatial resolutions may permit the extraction of both global and local geometric features, increasing the accuracy of 3D modeling of objects.Type: ApplicationFiled: November 8, 2023Publication date: May 16, 2024Applicants: Nikon Corporation, The Curators of the University of MissouriInventors: Chuanmao Fan, Ye Duan, Bausan Yuan
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Publication number: 20240164012Abstract: Provided is a method of manufacturing a metal wiring on a substrate, including the steps of: forming a first layer containing a first material in at least part on the substrate; forming a crack in the first layer to form the first layer having the crack; and forming a second layer containing a second material in the first layer having the crack.Type: ApplicationFiled: January 25, 2024Publication date: May 16, 2024Applicant: NIKON CORPORATIONInventors: Shohei KOIZUMI, Yoshiaki KITO, Seiji KAWABATA, Tohru KIUCHI
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Publication number: 20240163581Abstract: An imaging element includes: a first substrate including a plurality of pixels configured to output a signal based on charge obtained by photoelectric conversion; a second substrate including a conversion unit configured to convert at least a first signal output from a first pixel among the plurality of pixels and a second signal output from the first pixel after the first signal into digital signals; and a third substrate including a computing unit including a calculating unit configured to calculate evaluation values of first and second images generated on the basis of the first and second signals converted into digital signals by the conversion unit and a selecting unit configured to select data of at least one of the first and second images to be output to an outside on the basis of the evaluation values of the first and second images.Type: ApplicationFiled: March 29, 2022Publication date: May 16, 2024Applicant: NIKON CORPORATIONInventors: Hiroki YAMAZAKI, Fumiki NAKAMURA
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Patent number: 11982521Abstract: A method for measuring a spatial distortion of a target surface (110) of a workpiece (110A). Light is transmitted twice through a reference pattern-generator (104) and impinged upon a workpiece pattern-generator (108). Then, with an optical detector (116), first and second beams formed by the light as a result of interaction with two pattern- generators (104) (106) is acquired to produce a signal characterizing geometry of interference fringes formed at the detector (116) by the first and second beams. Indicia representing at least one of a type and a value of spatial distortion of the target surface (110) is generated and recorded. A system embodying the implementation of the method.Type: GrantFiled: February 22, 2018Date of Patent: May 14, 2024Assignee: Nikon CorporationInventors: Daniel Gene Smith, Michael B. Binnard
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Patent number: 11982868Abstract: A lens barrel and an imaging device which can be miniaturized, the lens barrel with a movable cylinder that moves along the optical axis with a change in focal length; first and second drive units in the movable cylinder; and first and second lens driven by the first and second drive units respectively to move along the optical axis relative to the movable cylinder. The movement amount of the first lens relative to the cylinder when the focal length is changed to a second focal length from a first state where the first lens is at a position closest to a subject with a first focal length is less than the movement amount of the first lens relative to the cylinder when the focal length is changed to the second focal length from a second state where the first lens is closer to an image plane than the first state.Type: GrantFiled: December 18, 2019Date of Patent: May 14, 2024Assignee: NIKON CORPORATIONInventors: Osamu Gomibuchi, Makoto Horikoshi, Mizuki Wayu, Tsuneo Watanabe, Kenichi Kitano
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Patent number: 11982602Abstract: The present invention provides a fluidic device in which solutions of different concentrations can be easily obtained.Type: GrantFiled: June 29, 2018Date of Patent: May 14, 2024Assignee: NIKON CORPORATIONInventors: Ryo Kobayashi, Hirofumi Shiono
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Patent number: 11980417Abstract: In an ophthalmology system, an right-eye imaged image is displayed on a display section for presentation to an observer through an optical unit and a reflection member. A left-eye imaged image is also displayed on a display section for presentation to an observer through an optical unit and a reflection member. A separation between the left and right imaged images is made wider than a spacing between the left and right optical units. This enables image presentation with the optical axes for the observer viewing the images intersecting in front so as to cause a convergence angle to arise.Type: GrantFiled: November 13, 2020Date of Patent: May 14, 2024Assignee: NIKON CORPORATIONInventors: Tomohiro Kawasaki, Ryoichi Sataka, Masahiro Mizuta
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Publication number: 20240153078Abstract: Image processing performed by a processor and including acquiring a first fundus image of an examined eye, acquiring a position for acquiring a tomographic image of the examined eye's fundus, acquiring a second fundus image of the examined eye, determining the acquired position is included in a specific range of the first fundus image, and computing a first movement amount of the examined eye in a case in which the acquired position is included in the specific range, using first registration processing to positionally align the first fundus image and the second fundus image, and computing a second movement amount of the examined eye in a case in which the acquired position falls outside the specific range, using second registration processing to positionally align the first fundus image and the second fundus image, the second registration processing being different from the first registration processing.Type: ApplicationFiled: January 5, 2024Publication date: May 9, 2024Applicant: NIKON CORPORATIONInventors: Yasushi TANABE, Tomoharu FUJIWARA, Motoki TOYAMA, Mariko MUKAI
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Patent number: D1028062Type: GrantFiled: August 30, 2021Date of Patent: May 21, 2024Assignee: NIKON CORPORATIONInventors: Makoto Imamizu, Masayoshi Ueno