Abstract: Various embodiments include an apparatus to retrofit into an electrostatic chuck (ESC) of an existing plasma-based processing system. The apparatus includes a tube adapter portion having a dielectric coating formed on an inner surface of the tube adapter portion to prevent arcing between high voltage electrodes within the tube adapter portion and a main body of the tube adapter portion during an operation of the plasma-based processing system, a number of insulative tubes with the high voltage electrodes to be enclosed therein, and an enlarged gap portion of the tube adapter portion proximate outboard ones of the plurality of insulative tubes to prevent arcing. Other methods of forming the ESC, and related devices, apparatuses, and systems are disclosed.

Abstract: In some examples, a dual-mode autonomous guided vehicle (AGV) is provided for docking a module in a fabrication bay. An example AGV may comprise a chassis for supporting the module on the AGV; drive means to transport the AGV under autonomous guidance, in a module transportation mode, to a specified location within the fabrication bay; a Cartesian x-y movement table to move the module under autonomous guidance, in a module docking mode, in an x- or y-docking direction, into a specific docking position; and a z-direction lift mechanism to move the module in a z-docking direction during the module docking mode.

Abstract: Methods and apparatuses for processing semiconductor substrates in an integration scheme to form chamferless vias are provided herein. Methods include bifurcating etching of dielectric by depositing a conformal removable sealant layer having properties for selective removal relative to dielectric material without damaging dielectric material. Some methods include forming an ashable conformal sealant layer. Methods also include forming hard masks including a Group IV metal and removing conformal removable sealant layers and hard masks in one operation using same etching chemistries.

Abstract: This disclosure relates generally to a patterning structure including an underlayer and an imaging layer, as well as methods and apparatuses thereof. In particular embodiments, the underlayer provides an increase in radiation absorptivity and/or patterning performance of the imaging layer.

Abstract: Disclosed are methods of radioisotope infusion comprising infusing saline comprising a diagnostic dose of a radioisotope, and delivering a pre-measured volume of push saline. The disclosed methods confer improved image quality with low background noise, higher signal to noise ratio (SNR) and higher contrast to noise ratio (CNR), leading to better diagnosis and thus eliminating the need of repeating the infusion and imaging which in turn reduces exposure of a patient to radiation.

Abstract: A transformational energy efficient technology using ionic liquid (IL) to couple with monoethanolamine (MEA) for catalytic CO2 capture is disclosed. [EMmim+][NTF2?] based catalysts are rationally synthesized and used for CO2 capture with MEA. A catalytic CO2 capture mechanism is disclosed according to experimental and computational studies on the [EMmim+][NTF2?] for the reversible CO2 sorption and desorption.

Abstract: Described herein are improved composite anodes and lithium-ion batteries made therefrom. Further described are methods of making and using the improved anodes and batteries. In general, the anodes include a porous composite having a plurality of agglomerated nanocomposites. At least one of the plurality of agglomerated nanocomposites is formed from a dendritic particle, which is a three-dimensional, randomly-ordered assembly of nanoparticles of an electrically conducting material and a plurality of discrete non-porous nanoparticles of a non-carbon Group 4A element or mixture thereof disposed on a surface of the dendritic particle. At least one nanocomposite of the plurality of agglomerated nanocomposites has at least a portion of its dendritic particle in electrical communication with at least a portion of a dendritic particle of an adjacent nanocomposite in the plurality of agglomerated nanocomposites.

Abstract: An apparatus for providing signals to a device may include one or more radio frequency signal generators, and electrically-small transmission line, which coupled signals from the one or more RF signal generators to a fabrication chamber. The apparatus may additionally include a reactive circuit to transform impedance of the electrically-small transmission line from a region of relatively high impedance-sensitivity to region of relatively low impedance-sensitivity.

Abstract: A substrate support for supporting a substrate in a substrate processing system includes a baseplate and a ceramic layer arranged above the baseplate. An outer perimeter of the ceramic layer is surrounded by an edge ring. An outer radius of the ceramic layer is greater than an inner radius of the edge ring such that an outer edge of the ceramic layer extends below the edge ring.

Abstract: A substrate processing system includes a processing chamber, a substrate support, a laser, and a collimating assembly. The substrate support is disposed in the processing chamber and is configured to support a substrate. The laser is configured to generate a laser beam. The collimating assembly includes lenses or mirrors arranged to direct the laser beam at the substrate to heat an exposed material of the substrate. The lenses or mirrors are configured to direct the laser beam in a direction within a predetermined range of being perpendicular to a surface of the substrate.

Abstract: An exemplary embodiment of the present disclosure provides a detector configured to output a signal associated with one or more interactions with subatomic particles. The detector comprises a sensor comprising a first diode comprising first semiconductor material abutting a first metal and forming a first junction, wherein the sensor is configured to be exposed to subatomic particles and a voltage reference member configured to generate a reference measurement. The sensor and the voltage reference member form a bandgap reference circuit. The present disclosure also provides methods for detecting subatomic particles from a solid-state detector comprising a first Schottky diode in electrical communication with a reference voltage member comprising a parallel circuit of two or more second Schottky diodes, wherein the first Schottky diode is configured to be exposed to subatomic particles and the second Schottky diodes of the reference voltage member are configured to generate a reference measurement.

Abstract: A method for forming a self-forming barrier in a feature of a substrate is provided, including the following operations: depositing a metallic liner in the feature of the substrate, the metallic liner being deposited over a dielectric of the substrate; depositing a zinc-containing precursor over the metallic liner; performing a thermal soak of the substrate; repeating the depositing of the zinc-containing precursor and the thermal soak of the substrate for a predefined number of cycles; wherein the method forms a zinc-containing barrier layer at an interface between the metallic liner and the dielectric.

Abstract: Prophylactic compositions for inhibiting or reducing HIV infection and methods of their use are provided. One embodiment provides an antibody or an antigen binding fragment thereof that specifically binds to an HIV protein, for example gp120, and Cinhibits or reduces the ability of the HIV vims to infect human cells. One embodiment provides a PGT121 antibody or antigen binding fragment thereof modified to contain a GPI membrane anchor, wherein the antibody specifically binds to an HIV protein. In some embodiments the GPI membrane anchor is in the heavy chain of the antibody or antigen fragment thereof. In some aspects the antibody or antigen binding fragment specifically to gp120 or gp41.

Abstract: An apparatus for reconstructing or filtering medical image data is provided. The apparatus includes processing circuitry to receive a first medical image data and meta-parameters related to the first medical image data; apply the received meta-parameters to inputs of a first trained machine-learning (ML) network, e.g., a multilayer perceptron, to obtain, from outputs of the first trained ML network, tuning parameters of a second ML network (e.g., a convolutional neural network) different from the first ML network; apply the received first medical image data to inputs of the second ML network, as tuned by the obtained tuning parameters output from the first ML network, to obtain, from outputs of the second ML network, second medical image data; and output the second medical image data. In one embodiment, the first medical image data is magnetic-resonance k-space data and the second medical data is a magnetic-resonance image.

Abstract: A method and an apparatus are disclosed for video coding using improved cross-component linear model (CCLM) prediction. The video coding method and the apparatus generate a first predictor of a current chroma block according to CCLM prediction, and additionally generate a second predictor of the current chroma block based on the neighboring pixels of the current chroma block in intra prediction of the current chroma block. The video coding method and the apparatus perform weighted combination on the first predictor and the second predictor.

Abstract: A variety of anodically-coloring electrochromic molecules are provided. In particular, anodically-coloring electrochromic molecules and devices are provided that allow for tuning the absorption bands in the cation state across the visible spectrum while demonstrating little to no coloring or visible absorption in the neutral state, resulting in high-contrast devices. Electrochromic devices are also provided, as well as methods of making the devices and molecules, and methods of use thereof.

Abstract: Provided herein are methods of depositing low stress and void free metal films in deep features and related apparatus. Embodiments of the methods include treating the sidewalls of the holes to inhibit metal deposition while leaving the feature bottom untreated. In subsequent deposition operations, metal precursor molecules diffuse to the feature bottom for deposition. The process is repeated with subsequent inhibition operations treating the remaining exposed sidewalls. By repeating inhibition and deposition operations, high quality void free fill can be achieved. This allows high temperature, low stress deposition to be performed.

Abstract: A pulley belt (100) for transmitting force from a first pulley (12) to a second pulley (14) includes a belt member (110) having a contact surface (120) configured to be in contact with the first pulley (12) and the second pulley (14). A plurality of projections (122) extends from the contact surface (120). The projections have a predetermined height/diameter aspect ratio. In a method of making a pulley belt, an uncured elastomer (316) is placed in a mold (310) having a shape of a belt member (320) with an inner surface from which patterned projections (312) extend inwardly. The uncured elastomer is cured to form a cured belt member (320), which is removed from the mold (310).

Abstract: A sensor includes a grayscale digital light processing (g-DLP) 3D printed monolithic substrate with at least one microfluid channel. The monolithic substrate is formed from a resin configured to form a solid polymer using g-DLP 3D printing with a Young's modulus ranging from 0.1 MPa to 100 MPa. The resin includes a donor moiety, an acceptor moiety different than the donor moiety, a rigid moiety, a photoinitiator, and a photoabsorber. The donor moiety is in the form of an acrylate monomer with a side group, the acceptor moiety is in the form of an acrylate monomer with a side group, and the rigid moiety is in the form of an acrylate monomer with a side group. Also, the sensor can include a sensor fluid disposed within the at least one microfluid channel.

Abstract: Methods and apparatuses for controlling precursor flow in a semiconductor processing tool are disclosed. A method may include flowing gas through a gas line, opening an ampoule valve(s), before a dose step, to start a flow of precursor from the ampoule to a process chamber through the gas line, closing the ampoule valve(s) to stop the precursor from flowing out of the ampoule, opening a process chamber valve, at the beginning of the dose step, to allow the flow of precursor to enter the process chamber, and closing the process chamber valve, at the end of the dose step, to stop the flow of precursor from entering the process chamber. A controller may include at least one memory and at least one processor and the at least one memory may store instructions for controlling the at least one processor to control precursor flow in a semiconductor processing tool.