Electromagnetic Radiation Delaminating Means (e.g., Microwave, Uv, Ir, Etc.) Patents (Class 156/753)
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Patent number: 11926432Abstract: This fuel tank dam closes a gap between a first structural component fixed to the inside surface of the outer plate of a fuel tank and a second structural component provided with a cutout part into which the first structural component is inserted. This fuel tank dam includes: a first portion that can be fixed to the first structural component; a second portion that has a surface extending in a direction intersecting with the first portion and can be fixed to the second structural component; and a third portion that has a bellows and is disposed between the first portion and the second portion. This fuel tank dam is configured such that the first portion, the second portion, and the third portion are integrated, the bellows has a thickness of 0.381 to 1.524 mm, and the second portion has a thickness of 0.762 to 7.620 mm.Type: GrantFiled: May 21, 2019Date of Patent: March 12, 2024Assignee: MITSUBISHI HEAVY INDUSTRIES, LTD.Inventors: Eizaburo Yamaguchi, Tadasuke Kurita, Hajime Tada, Akihiko Hirota, Akihisa Okuda, Kana Sakon
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Patent number: 9011638Abstract: A method of chip sorting comprises providing a chip holder having a first surface; providing multiple chips on the first surface; providing a chip receiver having a second surface, wherein the second surface faces the first surface; attaching the multiple chips to the second surface; decreasing an adhesion between the multiple chips and the first surface; and separating the multiple chips from the first surface after the step of decreasing the adhesion between the multiple chips and the first surface.Type: GrantFiled: March 19, 2014Date of Patent: April 21, 2015Assignee: Epistar CorporationInventors: Chen-Ke Hsu, Liang Sheng Chi, Chun-Chang Chen, Win-Jim Su, Hsu-Cheng Lin, Mei-Ling Tsai, Yi Lung Liu, Chen Ou
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Patent number: 9010398Abstract: A carrier substrate removing apparatus configured to separate a flexible substrate bonded to a carrier substrate includes a carrier substrate holding unit configured to hold the carrier substrate separated from the flexible substrate; an inclined separation unit configured, with the carrier substrate holding unit, to separate the flexible substrate from the carrier substrate and to transport the flexible substrate at an angle; and a transmittance measuring unit configured to measure a transmittance of the separated carrier substrate.Type: GrantFiled: March 5, 2013Date of Patent: April 21, 2015Assignee: Samsung Display Co., Ltd.Inventors: Jin-Keon Kweon, Kyung-Hoe Heo, Ki-Taek Kim
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Patent number: 8999107Abstract: A method for laser ashing of polyimide for a semiconductor manufacturing process using a structure, the structure comprising a supporting material attached to a semiconductor chip by a polyimide glue, includes releasing the supporting material from the polyimide glue, such that the polyimide glue remains on the semiconductor chip; and ashing the polyimide glue on the semiconductor chip using an ablating laser.Type: GrantFiled: October 31, 2011Date of Patent: April 7, 2015Assignee: International Business Machines CorporationInventors: Maxime Cadotte, Luc Guerin, Van Thanh Truong, Steve Whitehead
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Patent number: 8992726Abstract: A device for peeling off silicon wafers, including: a supporting member that is configured to support a board-shaped member to which plural silicon wafers are bonded via an adhesive; a heating unit for heating the board-shaped member; a shifting mechanism that is configured to shift, in a horizontal direction, the supporting member relatively with respect to the heating unit; a peeling-off mechanism that is configured to peel off the silicon wafers one by one; and a container for allowing the silicon wafers, the board-shaped member and the supporting member to soak in a liquid.Type: GrantFiled: May 23, 2013Date of Patent: March 31, 2015Assignee: Panasonic Intellectual Property Management Co., Ltd.Inventors: Koso Matsuno, Michirou Yoshino, Masayuki Takahashi, Tooru Furushige, Yuji Yamamoto
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Publication number: 20150083343Abstract: A supporting member separation method of separating a laminate formed by laminating a substrate, an adhesive layer, a release layer which is changed in quality by absorbing light, and a support plate in this order, the method including an irradiation step in which irradiation of laser light which is pulse-oscillated with a pulse having a pulse width of 20 ns or greater is performed to the release layer.Type: ApplicationFiled: January 17, 2013Publication date: March 26, 2015Inventors: Yasushi Fujii, Shinji Takase
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Patent number: 8951387Abstract: An apparatus for removing a protective film for a flat display panel includes a laser oscillating member configured to be disposed over the protective film, the protective film attached to a surface of the flat display panel, the laser oscillating member configured to cut the protective film into a plurality of division regions by irradiating a laser beam; a separation member configured to peel at least one of the plurality of division regions from the flat display panel; a spacer member configured for insertion between the protective film and the at least one division region to be peeled from the flat display panel; and an adhesive member configured for attachment to a surface of the division region opposite the spacer member on the division region, the spacer member and the adhesive member being configured to move in a same direction.Type: GrantFiled: June 7, 2012Date of Patent: February 10, 2015Assignee: Samsung Display Co., Ltd.Inventors: Ji-Hyeon Kang, Hyun-Chul Lee, Won-Kyu Lim
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Publication number: 20150035554Abstract: Structures and methods are provided for temporarily bonding handler wafers to device wafers using bonding structures that include one or more releasable layers which are laser-ablatable using mid-wavelength infrared radiationType: ApplicationFiled: March 27, 2014Publication date: February 5, 2015Applicant: International Business Machines CorporationInventors: Bing Dang, John U. Knickerbocker, Cornelia Kang-I Tsang
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Publication number: 20150013917Abstract: A bonding method including an adhesive layer forming process in which a thermoplastic adhesive is applied to a substrate or a support plate and an adhesive layer is formed; a heating process in which the adhesive layer that is formed on the substrate or the support plate is heated; and a bonding process in which the substrate and the support plate are pressed against each other via the heated adhesive layer, thereby bonding the substrate and the support plate.Type: ApplicationFiled: January 11, 2013Publication date: January 15, 2015Inventors: Yoshihiro Inao, Atsuo Kajima, Takuma Hasegawa, Koki Tamura, Shigeru Yokoi
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Patent number: 8894809Abstract: A method for disconnecting a first mechanical part from a second magnetic mechanical part, the first mechanical part being adhered to the second magnetic mechanical part by an adhesive film along a connecting area. In the method, a magnetic field is generated at least within the connecting area so as to generate, by induction, eddy currents in the second magnetic mechanical part, to soften the adhesive film and enable disconnection of the first and second mechanical parts.Type: GrantFiled: January 6, 2012Date of Patent: November 25, 2014Assignee: SNECMAInventor: Franck Bernard Leon Varin
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Publication number: 20140338827Abstract: Methods and apparatuses are provided where a parting agent is applied to at least one portion of a substrate. The at least one portion of the substrate is removed from a carrier.Type: ApplicationFiled: May 15, 2013Publication date: November 20, 2014Inventors: Adolf Koller, Franco Mariani, Katharina Umminger
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Patent number: 8845858Abstract: Disclosed is a method for separating a bonded body, whereby the bonded body can be separated easily. Specifically disclosed is a method for separating bonded bodies that includes a step that irradiates excimer light with a central wavelength of 1 to 300 nm on to a bonded body that has been formed by using an adhesive composition to bond substrates together, which includes and is formed by one type or two or more types of meth (acrylate) that have one or more (meth)acryloyl groups, and by hardening of said adhesive composition. At least one of the substrates is permeable to the excimer light.Type: GrantFiled: June 1, 2011Date of Patent: September 30, 2014Assignee: Denki Kagaku Kogyo Kabushiki KaishaInventors: Yoshitsugu Goto, Jun Watanabe, Norihiro Shimizu, Hiroyuki Kurimura, Isamu Ichikawa, Kenji Fukao, Yukihiro Morimoto
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Publication number: 20140251533Abstract: A method for fabricating a display device is provided. A laser having a power density is provided to a substrate coupling body. The substrate coupling body includes a first substrate and a second substrate coupled to the first substrate. The second substrate is separated from the first substrate. An optical property of the first substrate separated from the second substrate is measured. The power density of the laser is adjusted based on the optical property of the first substrate.Type: ApplicationFiled: November 29, 2013Publication date: September 11, 2014Applicant: SAMSUNG DISPLAY CO., LTD.Inventors: Hyung Chul Lim, Young Gu Kim, Hyun Jun Cho
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Patent number: 8800631Abstract: Provided is a laminated body comprising a substrate to be ground and a support, where the substrate is ground to a very small thickness and can then be separated from the support without damaging the substrate. One embodiment of the present invention is a laminated body comprising a substrate to be ground, a joining layer in contact with the substrate to be ground, a photothermal conversion layer comprising a light absorbing agent and a heat decomposable resin, and a light transmitting support. After grinding the substrate surface which is opposite that in contact with the joining layer, the laminated body is irradiated through the light transmitting layer and the photothermal conversion layer decomposes to separate the substrate and the light transmitting support.Type: GrantFiled: August 19, 2011Date of Patent: August 12, 2014Assignee: 3M Innovative Properties CompanyInventors: Kazuki Noda, Masaru Iwasawa
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Publication number: 20140144593Abstract: Structures and methods are provided for temporarily bonding handler wafers to device wafers using bonding structures that include one or more releasable layers that absorb long-wavelength infrared radiation to achieve wafer debonding by infrared radiation ablation.Type: ApplicationFiled: November 28, 2012Publication date: May 29, 2014Applicant: International Business Machiness CorporationInventors: Bing Dang, John U. Knickerbocker, Cornelia Kang-I Tsang
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Publication number: 20140138032Abstract: A carrier substrate removing apparatus configured to separate a flexible substrate bonded to a carrier substrate includes a carrier substrate holding unit configured to hold the carrier substrate separated from the flexible substrate; an inclined separation unit configured, with the carrier substrate holding unit, to separate the flexible substrate from the carrier substrate and to transport the flexible substrate at an angle; and a transmittance measuring unit configured to measure a transmittance of the separated carrier substrate.Type: ApplicationFiled: March 5, 2013Publication date: May 22, 2014Applicant: SAMSUNG DISPLAY CO., LTD.Inventors: Jin-Keon Kweon, Kyung-Hoe Heo, Ki-Taek Kim
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Patent number: 8714227Abstract: A chip sorting apparatus comprising a chip holder comprising a first surface and an second surface opposite to the first surface; a wafer comprising a first chip disposed on a first position of the first surface; a first chip receiver comprising a third surface and an fourth surface opposite to the third surface, wherein the third surface is opposite to the first surface; a pressurization device making the first chip and the third surface of the first chip receiver adhered to each other through pressuring the second surface at where corresponding to the first position; and a separator decreasing the adhesion between the first chip and the first surface.Type: GrantFiled: July 23, 2010Date of Patent: May 6, 2014Assignee: Epistar CorporationInventors: Chen-Ke Hsu, Liang-Sheng Chi, Chun-Chang Chen, Win-Jim Su, Hsu-Cheng Lin, Mei-Ling Tsai, Yi Lung Liu, Chen Ou
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Patent number: 8710458Abstract: A method of forming an integrated circuit includes providing a wafer, and a tape adhered to the wafer, wherein the tape has a main surface perpendicular to a first direction. The tape is exposed to a light to cause the tape to lose adhesion. In the step of exposing the tape, the wafer and the tape are rotated, and/or the light is tilt projected onto the tape, wherein a main projecting direction of the light and the first direction form a tilt angle greater than zero degrees and less than 90 degrees.Type: GrantFiled: October 19, 2010Date of Patent: April 29, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Hsiang Hu, Chen-Fa Lu, Chung-Shi Liu
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Publication number: 20140102643Abstract: Laser lift off systems and methods overlap irradiation zones to provide multiple pulses of laser irradiation per location at the interface between layers of material to be separated. To overlap irradiation zones, the laser lift off systems and methods provide stepwise relative movement between a pulsed laser beam and a workpiece. The laser irradiation may be provided by a non-homogeneous laser beam with a smooth spatial distribution of energy across the beam profile. The pulses of laser irradiation from the non-homogenous beam may irradiate the overlapping irradiation zones such that each of the locations at the interface is exposed to different portions of the non-homogeneous beam for each of the multiple pulses of the laser irradiation, thereby resulting in self-homogenization. Thus, the number of the multiple pulses of laser irradiation per location is generally sufficient to provide the self-homogenization and to separate the layers of material.Type: ApplicationFiled: December 20, 2013Publication date: April 17, 2014Applicant: IPG Microsystems LLCInventors: Cristian Porneala, Mathew Hannon, Marco Mendes, Jeffrey P. Sercel
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Patent number: 8679280Abstract: A method for releasing a handler from a wafer, the wafer comprising an integrated circuit (IC), includes attaching the handler to the wafer using an adhesive comprising a thermoset polymer, the handler comprising a material that is transparent in a wavelength range of about 193 nanometers (nm) to about 400 nm; ablating the adhesive through the handler using a laser, wherein a wavelength of the laser is selected based on the transparency of the handler material; and separating the handler from the wafer.Type: GrantFiled: May 27, 2010Date of Patent: March 25, 2014Assignee: International Business Machines CorporationInventors: Bing Dang, Matthew Farinelli, John Knickerbocker, Aparna Prabhakar, Robert E. Trzcinski, Cornelia K. Tsang
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Patent number: 8641851Abstract: An apparatus and method for manufacturing a flexible display device by a roll-to-roll method, are discussed. According to an embodiment, the apparatus includes a substrate transferring part for transferring a lower substrate attached onto a carrier substrate; a substrate separating part for separating the carrier substrate from the lower substrate transferred by the substrate transferring part; an upper bonding part for bonding an upper substrate to an upper surface of the lower substrate from which the carrier substrate is separated; and a lower bonding part for bonding a rear substrate to a lower surface of the lower substrate from which the carrier substrate is separated.Type: GrantFiled: July 13, 2012Date of Patent: February 4, 2014Assignee: LG Display Co., Ltd.Inventors: NamSeok Lee, SoonSung Yoo
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Publication number: 20130327485Abstract: A device for releasing an interconnect layer that provides a connection between a carrier and a wafer which forms a carrier-wafer combination. The device includes rotation means for rotation of the carrier-wafer combination in a release position, and a connection release means for providing an immersion bath that receives the carrier-wafer combination.Type: ApplicationFiled: August 8, 2013Publication date: December 12, 2013Applicant: EV Group GmbHInventor: Erich Thallner
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Patent number: 8450554Abstract: Provided herein is a system and method for facilitating removal of a drape from a tissue site. One aspect provides a system comprising a drape, and adhesive layer, and a release agent, where the system is adapted to be coupled to a tissue site and released therefrom upon or after exposure to an external stimulus. Another aspect provides a method for application and removal of a drape using less force than required with a conventional drape.Type: GrantFiled: February 27, 2009Date of Patent: May 28, 2013Assignee: KCI Licensing, Inc.Inventors: Timothy Mark Robinson, Kristine Kiesweller, Amy McNulty
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Patent number: 8419895Abstract: A method for releasing a handler from a wafer, the wafer comprising an integrated circuit (IC) includes attaching the handler to the wafer using an adhesive comprising a polymer; performing edge processing to remove an excess portion of the adhesive from an edge of the handler and wafer; ablating the adhesive through the handler using a laser, wherein a wavelength of the laser is selected based on the transparency of the handler material; and separating the handler from the wafer. A system for releasing a handler from a wafer, the wafer comprising an IC includes a handler attached to a wafer using an adhesive comprising a polymer; an edge processing module, the edge processing module configured to remove an excess portion of the adhesive from the edge of the handler and wafer; and a laser, the laser configured to ablate the adhesive through the handler.Type: GrantFiled: May 27, 2010Date of Patent: April 16, 2013Assignee: International Business Machines CorporationInventors: Bing Dang, John Knickerbocker, Aparna Prabhakar, Peter Sorce, Robert E. Trzcinski, Cornelia K. Tsang
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Patent number: 8388801Abstract: There is provided a method for separating an optical film bonded to an adherend with a pressure-sensitive adhesive layer interposed therebetween from the adherend. The pressure-sensitive adhesive layer is formed using an optical pressure-sensitive adhesive. The optical pressure-sensitive adhesive of the invention comprises a base polymer having a functional group (F); and a coupling agent that has a benzyl ester group and is represented by Formula (1): wherein A1 and A2 are different functional groups, one of A1 and A2 shows reactivity or interaction with the functional group (F) of the base polymer, R1 is an optionally substituted alkylene group of 1 to 12 carbon atoms and/or an optionally substituted phenylene group, and R2 and R3 are each a hydrogen atom or an alkyl group of 1 to 12 carbon atoms and may be the same or different.Type: GrantFiled: June 29, 2012Date of Patent: March 5, 2013Assignee: Nitto Denko CorporationInventors: Takashi Shimizu, Toshitsugu Hosokawa, Masayuki Satake
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Publication number: 20130014905Abstract: An ultrashort pulsed laser beam, the fluence of which on an interface BF is set to be larger than a substrate processing threshold and smaller than a film processing threshold, is irradiated to the interface BF via a thin film F. Thus, in a laser irradiated portion of the interface BF, the substrate W is selectively processed, bonding between the substrate and the thin film F is reduced and the thin film F is peeled.Type: ApplicationFiled: July 12, 2012Publication date: January 17, 2013Inventors: Yoshiyuki NAKAZAWA, Hirofumi MASUHARA, Koji ANDO
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Publication number: 20120318463Abstract: There is disclosed a method of separating laminated sheets comprising first and second sheets which are bonded by an adhesive interlayer, the method comprising heating the interlayer to soften it and causing the first and second sheets to be forced apart when the interlayer is softened.Type: ApplicationFiled: March 1, 2011Publication date: December 20, 2012Applicant: DELAM HOLDINGS PARTY LTDInventor: Anthony Anderson
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Patent number: 8313961Abstract: An apparatus and method for manufacturing a light emitting devices by separating a semiconductor layer from a substrate includes a laser beam source for emitting a laser beam, a mesh-typed mask having a plurality of apertures through which the laser beam passes to provide a plurality of unit beams; and an imaging lens for forming a plurality of beam spots by focusing the plurality of unit beams at an interface between a substrate and a semiconductor layer to separate the substrate from the semiconductor layer.Type: GrantFiled: March 16, 2011Date of Patent: November 20, 2012Assignee: QMC Co., Ltd.Inventor: Beng So Ryu
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Patent number: 8288680Abstract: An apparatus for removing heavy metals from a thin film stack. A glass or plastic substrate has a front surface and a back surface and a heavy metal thin film is deposited on the back surface. A laser is provided for generating high density radiation. A scanning means directs the high density radiation through the substrate so that the high density radiation impinges upon the heavy metal thin film. The substrate is disposed in contacting relation to a flowing liquid and a liquid bath is provided for containing the flowing liquid and collecting heavy metal that is ablated by the high density radiation. The heavy metals are filtered from the liquid bath. The same parts can also remove heavy metals from both sides of a substrate or may be used to remove only peripheral edges of a thin film stack.Type: GrantFiled: February 24, 2010Date of Patent: October 16, 2012Assignee: Vinyl Technologies, Inc.Inventor: Dirk Burrowes
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Patent number: 8211259Abstract: A separating method of a bonded body, the bonded body including two base members and a bonding film through which the base members are boded together, enabling to easily and efficiently separating the bonded body into the two original base members is provided. Further, the bonding film contains a silicone material composed of silicone compounds. The separating method includes: preparing the bonded body with the bonding film; and applying energy for separation to the bonding film so that cleavage is generated within the bonding film due to breakage of a part of molecular bonds of the silicone compounds, to thereby separate the bonded body into the first and second base members.Type: GrantFiled: November 26, 2008Date of Patent: July 3, 2012Assignee: Seiko Epson CorporationInventors: Mitsuru Sato, Takatoshi Yamamoto, Shintaro Asuke, Yoshiaki Mori, Kazuhiro Gomi
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Patent number: 8181688Abstract: An improved apparatus for temporary wafer bonding includes a temporary bonder cluster and a debonder cluster. The temporary bonder cluster includes temporary bonder modules that perform electronic wafer bonding processes including adhesive layer bonding, combination of an adhesive layer with a release layer bonding and a combination of a UV-light curable adhesive layer with a laser absorbing release layer bonding. The debonder cluster includes a thermal slide debonder, a mechanical debonder and a radiation debonder.Type: GrantFiled: April 15, 2010Date of Patent: May 22, 2012Assignee: Suss Microtec Lithography, GmbHInventors: Hale Johnson, Patrick Gorun, Emmett Hughlett, James Hermanowski, Matthew Stiles, Michael Kuhnle
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Publication number: 20120111496Abstract: A method for laser ashing of polyimide for a semiconductor manufacturing process using a structure, the structure comprising a supporting material attached to a semiconductor chip by a polyimide glue, includes releasing the supporting material from the polyimide glue, such that the polyimide glue remains on the semiconductor chip; and ashing the polyimide glue on the semiconductor chip using an ablating laser.Type: ApplicationFiled: October 31, 2011Publication date: May 10, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Maxime Cadotte, Luc Guerin, Van Thanh Truong, Steve Whitehead
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Publication number: 20120064735Abstract: A solid-state laser lift-off apparatus comprises: a solid-state laser (1), a light beam shaping lens (3), motors of oscillating mirrors (5,7), oscillating mirrors (4,6), a field lens (9), a movable platform (10), an industrial control computer and control software (8). The light beam shaping lens (3) is behind the solid-state laser (1), shaping the laser beam from the solid-state laser (1) into required shape. The motors of oscillating mirrors (5,7) are in front of the field lens (9), controlling the movement of the oscillating mirrors (4,6) according to the instruction of the control software (8) to implement different light beam scanning paths. A lift-off method for applying the solid-state laser lift-off apparatus uses a small laser spot to perform scanning, and enables damage-free separation of GaN from a sapphire substrate.Type: ApplicationFiled: May 5, 2010Publication date: March 15, 2012Inventors: Guoyi Zhang, Xinrong Yang, Mingkun He, Yongiian Sun
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Publication number: 20120000613Abstract: Device for stripping a wafer from a carrier that is connected to the wafer by an interconnect layer with: a receiving means for accommodating the carrier-wafer combination consisting of the carrier and the wafer, a connection release means for breaking the connection provided by the interconnect layer between the carrier and the wafer, and stripping means for stripping the wafer from the carrier, or for stripping the carrier from the wafer, the connection release means being made to work in a temperature range from 0 to 350° C., especially from 10 to 200° C., preferably from 20 to 80° C., and more preferably at ambient temperature.Type: ApplicationFiled: March 16, 2010Publication date: January 5, 2012Inventor: Erich Thallner
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Patent number: 8052836Abstract: Laser-based methods of stripping different types of fiber optic cables (100) are disclosed. The method includes directing a focused laser beam (202) onto the cable's protective cover (114). The method also includes moving the fiber optic cable relative to the focused laser beam in a direction substantially along a central axis (AC) to form a substantially axially oriented groove (250) in the protective cover, wherein the groove does not reach one or more optical fibers (110) carried by the cable. The method can further include opening the protective cover at the groove to form a split protective cover portion (114S), and removing the split protective cover portion from the fiber optic cable. Methods of stripping a cable by forming two grooves in the protective cover using two focused laser beams are also disclosed.Type: GrantFiled: November 26, 2008Date of Patent: November 8, 2011Assignee: Corning Cable Systems LLCInventors: Andrew Stephen Cale, Jeffrey Dean Danley, David Lee Dean, Jr., Terry Lee Cooke, Clyde Benton Mabry, III, Darrin Max Miller
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Patent number: 8038839Abstract: Provided is a laminated body comprising a substrate to be ground and a support, where the substrate is ground to a very small thickness and can then be separated from the support without damaging the substrate. One embodiment of the present invention is a laminated body comprising a substrate to be ground, a joining layer in contact with the substrate to be ground, a photothermal conversion layer comprising a light absorbing agent and a heat decomposable resin, and a light transmitting support. After grinding the substrate surface which is opposite that in contact with the joining layer, the laminated body is irradiated through the light transmitting layer and the photothermal conversion layer decomposes to separate the substrate and the light transmitting support.Type: GrantFiled: October 22, 2009Date of Patent: October 18, 2011Assignee: 3M Innovative Properties CompanyInventors: Kazuki Noda, Masaru Iwasawa
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Patent number: 7972473Abstract: A method for recycling thin-film solar cell modules which are which are composed of a substrate layer with a superimposed structure of functional layers, a plastic layer that encapsulates the functional layers, and a cover layer. The substrate layer is transparent to a working laser beam, and the first functional layer, an electrode layer, is able to absorb this working laser beam. The free surface of the substrate layer is scanned with the working laser beam so that the first electrode layer, due to having absorbed the working laser beam, is at least partially vaporized and the superimposed structure of the functional layers is thus detached from the substrate layer. The substrate layer, separately from the functional layers that are attached to the plastic layer and the cover layer, is subsequently available for separate further processing.Type: GrantFiled: June 8, 2009Date of Patent: July 5, 2011Assignee: Jenoptik Automatisierungstechnik GmbHInventors: Uwe Wagner, Frank Schmieder
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Publication number: 20110139375Abstract: An adhesive tape joined to a wafer is irradiated with ultraviolet rays via diodes. Simultaneously, a heater heats the adhesive tape to a preset temperature. Consequently, an ultraviolet reaction with the diodes and an infrared reaction with the heater may ensure promotion of a polymerization reaction, which results in cure of an adhesive that is not curable with only ultraviolet rays. As a result, an adhesive force of the adhesion tape may sufficiently be reduced. After ultraviolet irradiation via the diodes and heating with the heater, a separation mechanism separates the adhesive tape from the wafer. Therefore, accurate separation may be realized of the adhesive tape joined to the wafer.Type: ApplicationFiled: December 13, 2010Publication date: June 16, 2011Inventors: Masayuki Yamamoto, Masaru Irie
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Publication number: 20110132549Abstract: Laser lift off systems and methods may be used to provide monolithic laser lift off with minimal cracking by reducing the size of one or more beam spots in one or more dimensions to reduce plume pressure while maintaining sufficient energy to provide separation. By irradiating irradiation zones with various shapes and in various patterns, the laser lift off systems and methods use laser energy more efficiently, reduce cracking when separating layers, and improve productivity. Some laser lift off systems and methods described herein separate layers of material by irradiating non-contiguous irradiation zones with laser lift off zones (LOZs) that extend beyond the irradiation zones. Other laser lift off systems and methods described herein separate layers of material by shaping the irradiation zones and by controlling the overlap of the irradiation zones in a way that avoids uneven exposure of the workpiece.Type: ApplicationFiled: December 7, 2010Publication date: June 9, 2011Applicant: J.P. Sercel Associates, Inc.Inventors: Jeffrey P. Sercel, Marco Mendes, Jie Fu